ASTM F1396-1993(2005) 测定气体分配系统组件供氧的标准试验方法
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【英文标准名称】:StandardTestMethodforDeterminationofOxygenContributionbyGasDistributionSystemComponents
【原文标准名称】:测定气体分配系统组件供氧的标准试验方法
【标准号】:ASTMF1396-1993(2005)
【标准状态】:现行
【国别】:
【发布日期】:1993
【实施或试行日期】:
【发布单位】:美国材料与试验协会(US-ASTM)
【起草单位】:F01.10
【标准类型】:(TestMethod)
【标准水平】:()
【中文主题词】:分布系统;试验;气体分配
【英文主题词】:Flowandflowrate-semiconductorapplications;Gasdistributionsystems;Oxygen;Oxygencontribution;Semiconductorcleanrooms;oxygencontributionbygasdistributionsystemcomponents
【摘要】:Thistestmethoddefinesaprocedurefortestingcomponentsbeingconsideredforinstallationintoahigh-puritygasdistributionsystem.Applicationofthistestmethodisexpectedtoyieldcomparabledataamongcomponentstestedforpurposesofqualificationforthisinstallation.1.1Thistestmethodcoversaprocedurefortestingcomponentsforoxygencontributiontoultra-highpuritygasdistributionsystemsatambienttemperature.Inaddition,thistestmethodallowstestingofthecomponentatelevatedambienttemperaturesashighas70176C.1.2Thistestmethodappliestoin-linecomponentscontainingelectronicsgradematerialssuchasthoseusedinasemiconductorgasdistributionsystem.1.3Limitations:1.3.1Thistestmethodislimitedbythesensitivityofcurrentinstrumentation,aswellastheresponsetimeoftheinstrumentation.Thistestmethodisnotintendedtobeusedfortestcomponentslargerthan12.7-mm(1/2-in.)outsidediameternominalsize.Thistestmethodcouldbeappliedtolargercomponents;however,thestatedvolumetricflowratemaynotprovideadequatemixingtoensurearepresentativesample.Higherflowratesmayimprovethemixingbutexcessivelydilutethesample.1.3.2Thistestmethodiswrittenwiththeassumptionthattheoperatorunderstandstheuseoftheapparatusatalevelequivalenttosixmonthsofexperience.1.4ThevaluesstatedinSIunitsaretoberegardedasthestandard.Theinch-poundunitsgiveninparenthesesareforinformationonly.1.5Thisstandarddoesnotpurporttoaddressallofthesafetyproblems,ifany,associatedwithitsuse.Itistheresponsibilityoftheuserofthisstandardtoestablishappropriatesafetyandhealthpracticesanddeterminetheapplicabilityofregulatorylimitationspriortouse.SpecifichazardstatementsaregiveninSection6.
【中国标准分类号】:J15
【国际标准分类号】:23_040_01
【页数】:9P.;A4
【正文语种】:
【原文标准名称】:测定气体分配系统组件供氧的标准试验方法
【标准号】:ASTMF1396-1993(2005)
【标准状态】:现行
【国别】:
【发布日期】:1993
【实施或试行日期】:
【发布单位】:美国材料与试验协会(US-ASTM)
【起草单位】:F01.10
【标准类型】:(TestMethod)
【标准水平】:()
【中文主题词】:分布系统;试验;气体分配
【英文主题词】:Flowandflowrate-semiconductorapplications;Gasdistributionsystems;Oxygen;Oxygencontribution;Semiconductorcleanrooms;oxygencontributionbygasdistributionsystemcomponents
【摘要】:Thistestmethoddefinesaprocedurefortestingcomponentsbeingconsideredforinstallationintoahigh-puritygasdistributionsystem.Applicationofthistestmethodisexpectedtoyieldcomparabledataamongcomponentstestedforpurposesofqualificationforthisinstallation.1.1Thistestmethodcoversaprocedurefortestingcomponentsforoxygencontributiontoultra-highpuritygasdistributionsystemsatambienttemperature.Inaddition,thistestmethodallowstestingofthecomponentatelevatedambienttemperaturesashighas70176C.1.2Thistestmethodappliestoin-linecomponentscontainingelectronicsgradematerialssuchasthoseusedinasemiconductorgasdistributionsystem.1.3Limitations:1.3.1Thistestmethodislimitedbythesensitivityofcurrentinstrumentation,aswellastheresponsetimeoftheinstrumentation.Thistestmethodisnotintendedtobeusedfortestcomponentslargerthan12.7-mm(1/2-in.)outsidediameternominalsize.Thistestmethodcouldbeappliedtolargercomponents;however,thestatedvolumetricflowratemaynotprovideadequatemixingtoensurearepresentativesample.Higherflowratesmayimprovethemixingbutexcessivelydilutethesample.1.3.2Thistestmethodiswrittenwiththeassumptionthattheoperatorunderstandstheuseoftheapparatusatalevelequivalenttosixmonthsofexperience.1.4ThevaluesstatedinSIunitsaretoberegardedasthestandard.Theinch-poundunitsgiveninparenthesesareforinformationonly.1.5Thisstandarddoesnotpurporttoaddressallofthesafetyproblems,ifany,associatedwithitsuse.Itistheresponsibilityoftheuserofthisstandardtoestablishappropriatesafetyandhealthpracticesanddeterminetheapplicabilityofregulatorylimitationspriortouse.SpecifichazardstatementsaregiveninSection6.
【中国标准分类号】:J15
【国际标准分类号】:23_040_01
【页数】:9P.;A4
【正文语种】:
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